Target device and measuring system
AssigneeTopcon Corporation
InventorNobuyuki Nishita
Life of this patent
Estimating the term…
Abstract
A target device, which allows a sufficient amount of reflected light to be obtained from an end portion, is provided and includes a measurement section. In the target device, a retroreflective layer in which a plurality of retroreflective elements are arranged on the entire circumference in a circumferential direction about an axis is formed on at least part of the outer peripheral surface of the measurement section. The retroreflective layer is formed into an uneven shape in which a distance from the axis changes along the entire circumference in the circumferential direction.
Claims13
A target device which is to be measured with measuring light emitted by a measuring device, the target device comprising:
- a measurement section which is substantially in a shape of a solid of revolution about an axis,
- wherein a retroreflective layer in which a plurality of retroreflective elements are arranged on an entire circumference in a circumferential direction about the axis is on at least part of an outer peripheral surface of the measurement section, and
- the retroreflective layer is a shape, wherein the shape comprises a peak of a first distance from the axis and a valley of a second distance from the axis, the second distance smaller than the first distance, the peak and the valley being in a cyclical configuration such that a distance from the axis changes along the entire circumference in the circumferential direction.
A measuring system comprising:
- a target device;
- and
- a measuring device configured to detect a measuring point of the target device by applying measuring light to the target device and receiving reflected light from the target device,
- wherein the target device includes a measurement section which is substantially in a shape of a solid of revolution about an axis, and
- wherein a retroreflective layer a plurality of retroreflective elements are arranged on an entire circumference in a circumferential direction about the axis is on at least part of an outer peripheral surface of the measurement section, and
- the retroreflective layer a shape, wherein the shape comprises a peak of a first distance from the axis and a valley of a second distance from the axis, the second distance smaller than the first distance, the peak and the valley being in a cyclical configuration such that a distance from the axis changes along the entire circumference in the circumferential direction.
Dependencies are inferred from the claim text.