Probe card for testing wafer
AssigneePRO-2000 Co., LTD
InventorJun Soo Cho
Life of this patent
Estimating the term…
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AssigneePRO-2000 Co., LTD
InventorJun Soo Cho
Estimating the term…
Disclosed is a probe card for testing a wafer. The probe card includes a substrate and a block including an insulation portion and a conducting portion disposed on the insulation portion. Here, the insulation portion includes a via and a probe pin which comes into contact with an object to be tested. The conducting portion includes a contact point electrically connected to the substrate and a conducting pattern passing through the via and electrically connecting the contact point to the probe pin. A pitch between a plurality of such probe pins is smaller than a pitch between a plurality of such contact points. The block includes a plurality of unit blocks. The plurality of unit blocks each include the insulation portion and the conducting portion, and at least parts of the insulation portions of the unit blocks are arranged while being spaced apart from each other.
A probe card for testing a wafer, the probe card comprising:
A probe card for testing a wafer, the probe card comprising:
A probe card for testing a wafer, the probe card comprising:
A probe card for testing a wafer, the probe card comprising:
Dependencies are inferred from the claim text.