Physical quantity sensor, physical quantity sensor device, and inclinometer, inertia measurement device, structure monitoring device, and vehicle using physical quantity sensor device
AssigneeSeiko Epson Corporation
InventorKenta Sato
Life of this patent
Estimating the term…
Abstract
A physical quantity sensor includes a base, at least two arms, a movable plate, a hinge, and a physical quantity measurement element. Four quadrants of the sensor are defined by first and second orthogonal lines. The first line passes through the center of the sensor and crosses the hinge. The second line extends along the hinge. Fixed regions of the sensor are located in the first and second quadrants. No fixed regions are located in at least one of the third and fourth quadrants. The third and fourth quadrants are closer to the base than the first and second quadrants in a plan view.
Claims18
A physical quantity sensor device comprising:
- a package base;
- and
- a physical quantity sensor mounted on the package base,
- wherein the physical quantity sensor comprises:
- a base;
- a movable portion connected to the base;
- a physical quantity measurement element, wherein one end side of the physical quantity measurement element is fixed to the base and the other end side of the physical quantity measurement element is fixed to the movable portion;
- a first arm connected to the base and fixed to the package base;
- a second arm connected to the base and fixed to the package base;
- and
- a third arm connected to the base and fixed to the package base,
- wherein the movable portion is located between the first arm and the second arm in a plan view,
- the third arm is located on an opposite side of the base as the movable portion in a plan view, and
- the physical quantity sensor is fixed to the package base only by the first arm, the second arm, and the third arm.
Dependencies are inferred from the claim text.