Biosensor and method of forming the same
AssigneeVisEra Technologies Company Limited
InventorsHsin-Yi Hsieh, Chin-Chuan Hsieh, Wei-Ko Wang, Yu-Jen Chen, Yi-Hua Chiu, Chung-Jung Hsu
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Abstract
A biosensor is provided. The biosensor includes a substrate, photodiodes, pixelated filters, an excitation light rejection layer and an immobilization layer. The substrate has pixels. The photodiodes are disposed in the substrate and correspond to one of the pixels, respectively. The pixelated filters are disposed on the substrate. The excitation light rejection layer is disposed on the pixelated filter. The immobilization layer is disposed on the excitation light rejection layer.
Claims19
A biosensor, comprising:
- a substrate having pixels;
- photodiodes disposed in the substrate and corresponding to one of the pixels, respectively;
- pixelated filters disposed on the substrate;
- an excitation light rejection layer disposed on the pixelated filter;
- an immobilization layer disposed on the excitation light rejection layer;
- and
- an aperture structure embedded in the immobilization layer,
- wherein the pixelated filters are isolated by a grid wall, and a top surface of the grid wall and a top surface of the pixelated filters are coplanar,
- wherein the aperture structure completely overlaps a first group of the photodiodes and exposes a second group of the photodiodes, with the first and second groups of the photodiodes arranged alternately.
A method of forming a biosensor, comprising:
- providing a substrate having pixels;
- forming photodiodes in the substrate, wherein each of the photodiodes corresponds to one of the pixels, respectively;
- forming pixelated filters on the substrate;
- forming an excitation light rejection layer on the pixelated filters;
- forming an immobilization layer on the excitation light rejection layer;
- and
- forming an aperture structure embedded in the immobilization layer,
- wherein the pixelated filters are isolated by a grid wall, and a top surface of the grid wall and a top surface of the pixelated filters are coplanar,
- wherein the aperture structure completely overlaps a first group of the photodiodes and exposes a second group of the photodiodes, with the first and second groups of the photodiodes arranged alternately.
Dependencies are inferred from the claim text.