Pressure sensor with calibration device and calibration method thereof

A pressure sensor with calibration device, comprising:

• a casing having a first rigidity;
• a diaphragm disposed on the casing and having a second rigidity, wherein the casing and the diaphragm define an accommodating space;
• a sensing element disposed in the casing and comprising a sensing film, wherein the sensing film has a third rigidity;
• a medium filled in the accommodating space and in contact with the sensing element;
• and
• at least one calibration element adjustably disposed at the casing and extended into the accommodating space to be in contact with the medium, wherein each of the at least one calibration element has a fourth rigidity, the casing comprises at least one hole communicating with the accommodating space, wherein each of the at least one calibration element is coupled to the corresponding hole, and when the at least one calibration element is moved relative to the casing in a direction toward the accommodating space or in a direction away from the accommodating space, the at least one calibration element changes a pressure applied to the medium so that a pressure value sensed by the sensing element is changed, and
• the first rigidity and the fourth rigidity are greater than the second rigidity, and the second rigidity is greater than the third rigidity.

A calibration method of a pressure sensor with calibration device, comprising:

• providing a pressure sensor, wherein the pressure sensor comprises a casing, a diaphragm, a sensing element, a medium, and at least one calibration element, the diaphragm is disposed on the casing, the casing and the diaphragm define an accommodating space, the sensing element is disposed in the casing, the medium is filled in the accommodating space and in contact with the sensing element, the at least one calibration element is adjustably disposed at the casing and extended into the accommodating space to be in contact with the medium, the casing comprises at least one hole communicating with the accommodating space, wherein each of the at least one calibration element is coupled to the corresponding hole, and when the at least one calibration element is moved relative to the casing in a direction toward the accommodating space or in a direction away from the accommodating space, the at least one calibration element changes a pressure applied to the medium so that a pressure value sensed by the sensing element is changed;
• measuring the pressure value sensed by the sensing element;
• increasing a volume of a portion of the at least one calibration element when the pressure value is less than a specific value, wherein the volume is extended into the accommodating space to increase the pressure applied to the medium until the pressure value sensed by the sensing element is equal to the specific value;
• and
• decreasing the volume of the portion of the at least one calibration element when the pressure value is greater than the specific value, wherein the volume is extended into the accommodating space to decrease the pressure applied to the medium until the pressure value sensed by the sensing element is equal to the specific value.