Process for manufacturing a microbolometer containing vanadium oxide-based sensitive material
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsDenis Pelenc, Xavier Zucchi, Claire Vialle, Valerie Goudon, Abdelkader Aliane
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Abstract
A microbolometer may include a sensitive material based on vanadium oxide (VOx) with an additional chemical element such as boron (B), but excluding nitrogen (N), the sensitive material wherein the sensitive material (i) is amorphous, (ii) has an electrical resistivity at ambient temperature in a range of from 1 to 30 Ω·cm, (ii) has a homogeneous chemical composition, and (iv) has an amount of boron, defined as a ratio of a number of boron to vanadium atoms to that of vanadium, at least equal to 0.086.
Claims21
A microbolometer, comprising:
- a sensitive material comprising a first compound comprising vanadium oxide (VOx) and boron as additional chemical element, but excluding nitrogen,
- wherein the sensitive material is amorphous,
- wherein the sensitive material has an electrical resistivity at ambient temperature in a range of from 1 to 30 Ω·cm,
- wherein the sensitive material has a homogeneous chemical composition, and
- wherein the sensitive material has an amount of boron, defined as a ratio of a number of boron atoms to that of vanadium, at least equal to 0.086.
Dependencies are inferred from the claim text.