Method for regulating inert gas flow, method for preparing monocrystalline silicon, and monocrystalline silicon
AssigneesXi'an Eswin Material Technology Co., Ltd., Xi'an Eswin Silicon Wafer Technology Co., Ltd.
InventorsHao Pan, Hyunguk Jeon
Life of this patent
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Abstract
The present disclosure provides a method for regulating an inert gas flow in a crystal pulling furnace, a method for preparing monocrystalline silicon, and monocrystalline silicon. The method for regulating an inert gas flow includes introducing the inert gas into a main furnace chamber of the crystal pulling furnace from an auxiliary furnace chamber of the crystal pulling furnace, and regulating a flow direction of the inert gas flow introduced into the auxiliary furnace chamber of the crystal pulling furnace.
Claims12
A method for regulating an inert gas flow in a crystal pulling furnace, comprising:
- introducing the inert gas into a main furnace chamber of the crystal pulling furnace from an auxiliary furnace chamber of the crystal pulling furnace;
- regulating a flow direction of the inert gas flow introduced into the auxiliary furnace chamber of the crystal pulling furnace in which at least two flow stabilizing hoods are installed;
- and
- adjusting a distance between adjacent two flow stabilizing hoods of the at least two flow stabilizing hoods by a spacing adjustment mechanism so that a steady flow interval of the inert gas is formed between the adjacent two flow stabilizing hoods.
A method for regulating an inert gas flow in a crystal pulling furnace, comprising:
- introducing the inert gas into a main furnace chamber of the crystal pulling furnace from an auxiliary furnace chamber of the crystal pulling furnace;
- and
- regulating a flow direction of the inert gas flow introduced into the auxiliary furnace chamber of the crystal pulling furnace in which at least two flow stabilizing hoods are installed,
- wherein the at least two flow stabilizing hoods are all funnel-shaped flow stabilizing hoods with a wide mouth at one end and a narrow mouth at the other end, and adjacent two flow stabilizing hoods of the at least two flow stabilizing hoods are arranged so that their narrow mouths or their wide mouths are opposite with each other.
Dependencies are inferred from the claim text.