Diaphragm-based fiber acoustic sensor
AssigneeThe Board of Trustees of the Leland Stanford Junior University
InventorsMichel J.F. Digonnet, Behrad Habib Afshar
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Abstract
A sensor includes at least one optical waveguide and an optical reflector optically coupled to the at least one optical waveguide. The optical reflector includes a first substrate portion configured to reflect a first portion of a light beam back to the at least one optical waveguide and a diaphragm configured to reflect a second portion of the light beam back to the at least one optical waveguide. The diaphragm is responsive to a perturbation by moving relative to the first substrate portion. The light beam is centered on a region between the first substrate portion and the diaphragm.
Claims23
A sensor comprising:
- at least one optical waveguide configured to emit a light beam;
- and
- an optical reflector optically coupled to the at least one optical waveguide, the optical reflector configured to be illuminated by the light beam and to reflect at least a portion of the light beam to the at least one optical waveguide, a distance between an end of the at least one optical waveguide and the optical reflector less than 100 microns, the optical reflector comprising:
- a first substrate portion configured to reflect a first portion of the light beam back to the at least one optical waveguide;
- and
- a diaphragm configured to reflect a second portion of the light beam back to the at least one optical waveguide, the diaphragm responsive to a perturbation by moving relative to the first substrate portion, the light beam centered on a region between the first substrate portion and the diaphragm.
Dependencies are inferred from the claim text.