Vacuum valve and actuator used in vacuum valve
AssigneeSumitomo Heavy Industries, Ltd.
InventorEmmanuel Vyers
Life of this patent
Estimating the term…
Abstract
A vacuum valve includes a valve plate that covers an exhaust port of a vacuum chamber, and a poppet type actuator that drives the valve plate in an axial direction orthogonal to a surface of the vacuum chamber on which the exhaust port is provided. The actuator includes a shaft that is connected to the valve plate, a drive unit that is disposed side by side with the shaft in a radial direction of the shaft and includes a ball screw shaft and a drive source that rotates the ball screw shaft, and a connection part that connects the ball screw shaft and the shaft and moves in the axial direction together with the shaft to a position where the valve plate covers the exhaust port.
Claims15
A vacuum valve comprising:
- a valve plate that covers an exhaust port of a vacuum chamber;
- and
- a poppet type actuator that drives the valve plate in an axial direction orthogonal to a surface of the vacuum chamber on which the exhaust port is provided,
- wherein the actuator includes
- a shaft that is connected to the valve plate,
- a drive unit that is disposed side by side with the shaft in a radial direction of the shaft and includes a ball screw shaft and a drive source that rotates the ball screw shaft, and
- a connection part that connects the ball screw shaft and the shaft and moves in the axial direction together with the shaft to a position where the valve plate covers the exhaust port.
A poppet type valve actuator for a vacuum chamber, comprising:
- a shaft that drives a valve plate that covers an exhaust port of the vacuum chamber, in an axial direction orthogonal to a surface on which the exhaust port is provided;
- a drive unit that is disposed side by side with the shaft in a radial direction of the shaft and includes a ball screw shaft and a drive source that rotates the ball screw shaft;
- and
- a connection part that connects the ball screw shaft and the shaft and moves in the axial direction together with the shaft.
Dependencies are inferred from the claim text.