Parameter setting method and control apparatus

A method of setting a parameter for adjusting vibration isolation characteristics of a vibration isolation apparatus, performed by a control apparatus, wherein

• a device that includes at least one axis and a movable portion driven by a servo motor on the axis is disposed on the vibration isolation apparatus,
• the control apparatus controls the device, and
• the control apparatus includes a storage unit configured to store a plurality of sets of candidate values of parameters for adjusting the vibration isolation characteristics of the vibration isolation apparatus, wherein each of the sets of candidate values contains candidate values of respective types of the parameters, the parameter setting method comprising:
• a servo motor control step of controlling the servo motor to position the movable portion at a command position;
• and
• a parameter value changing step of, when a magnitude of a deviation that is a difference between the command position and an actual position of the movable portion is greater than or equal to a prescribed value during operation of the vibration isolation apparatus, selecting an unselected set of candidate values from among the plurality of sets of candidate values and changing values of the respective types of the parameters of the vibration isolation apparatus to the selected set of candidate values, and when the magnitude of the deviation is less than the prescribed value, not changing the values of the respective types of the parameters, wherein
• after the parameter value changing step is finished, the parameter value changing step is repeated until the magnitude of the deviation becomes less than the prescribed value.