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US 11,629,730 B2Granted
Vacuum pump
AssigneeShimadzu Corporation
InventorHiroaki Kimura
Life of this patent
Estimating the term…
Abstract
A vacuum pump comprises: a cylindrical rotor; multiple heat insulating pins; and a stator having a cylindrical portion arranged with a predetermined gap in an outer peripheral side of the rotor and a fixing portion to be fixed to a pump base through the multiple heat insulating pins. The heat insulating pins have a lower thermal conductivity than those of the stator and the pump base, and support the fixing portion.
Claims8
A vacuum pump comprising:
- a cylindrical rotor;
- multiple heat insulating pins;
- and
- a stator having a cylindrical portion arranged with a predetermined gap in an outer peripheral side of the rotor and a fixing portion to be fixed to a pump base through the multiple heat insulating pins,
- wherein the heat insulating pins have a lower thermal conductivity than those of the stator and the pump base, and support the fixing portion in an axial direction.
2 more elements
A vacuum pump comprising:
- a cylindrical rotor;
- multiple heat insulating pins;
- and
- a stator having a cylindrical portion arranged with a predetermined gap in an outer peripheral side of the rotor and a fixing portion to be fixed to a pump base through the multiple heat insulating pins,
- wherein the heat insulating pins have a lower thermal conductivity than those of the stator and the pump base, and support the fixing portion, wherein
- each heat insulating pin is a stepped pin having a large-diameter portion engaging with a pin hole formed at the pump base and a small-diameter portion engaging with a pin hole formed at the fixing portion of the stator, and
- the fixing portion of the stator is supported by a step portion formed at a boundary between the small-diameter portion and the large-diameter portion of the stepped pin, and positioning of the stator in the pump axial direction, a stator radial direction, and a stator circumferential direction is performed by the stepped pin.
4 more elements
A vacuum pump comprising:
- a cylindrical rotor;
- multiple heat insulating pins;
- and
- a stator having a cylindrical portion arranged with a predetermined gap in an outer peripheral side of the rotor and a fixing portion to be fixed to a pump base through the multiple heat insulating pins,
- wherein the heat insulating pins have a lower thermal conductivity than those of the stator and the pump base, and support the fixing portion, wherein
- a pin hole formed at the pump base and engaging with each heat insulating pin includes
- a hole-far-side small-diameter hole portion engaging with each heat insulating pin and a hole-inlet-side large-diameter hole portion configured such that a clearance is formed between the large-diameter hole portion and each heat insulating pin.
4 more elements
Dependencies are inferred from the claim text.