Inline microwave batch degas chamber

A degas chamber, comprising:

• a chamber body including an interior volume having a polygon shape, wherein the chamber body includes a selectively sealable elongated opening for transferring one or more substrates into or out of the chamber body;
• a substrate support disposed in the interior volume and configured to support one or more substrates, wherein the substrate support is movable at least to a raised position aligned with the elongated opening and to a lowered position;
• a heat source configured to heat the one or more substrates when disposed on the substrate support;
• and
• an exhaust port disposed in the chamber body, wherein the chamber body includes a funnel disposed opposite the exhaust port, wherein surfaces of the funnel include a plurality of gas openings.

A microwave degas chamber, comprising:

• a chamber body including an interior volume having sidewalls that define a regular polygon shape, wherein the chamber body includes a first selectively sealable elongated opening for transferring one or more substrates into the chamber body and a second selectively sealable elongated opening for transferring the one or more substrates out of the chamber body;
• a substrate support disposed in the interior volume and configured to support a plurality of substrates in a vertically spaced apart orientation, the substrate support comprising a plurality of support members and a plurality of lift members configured to be controlled independently of the plurality of support members to selectively raise or lower the plurality of substrates onto or off of the plurality of support members;
• a microwave source coupled to the chamber body at a first end of the chamber body;
• a funnel disposed in one of the sidewalls of the chamber body at the first end of the chamber body;
• a plurality of openings disposed in the sidewalls of the chamber body adjacent to the funnel to flow gas into the interior volume;
• and
• a pump coupled to the chamber body at a second end of the chamber body opposite the first end.