Cathodic arc ignition device
AssigneeOerlikon Surface Solutions AG, PfäFfikon
InventorsSiegfried Krassnitzer, Juerg Hagmann, Andreas Peter Treuholz, Dominik Erwin Widmer
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AssigneeOerlikon Surface Solutions AG, PfäFfikon
InventorsSiegfried Krassnitzer, Juerg Hagmann, Andreas Peter Treuholz, Dominik Erwin Widmer
Estimating the term…
An arc ignition device for cathodic arc deposition of a target material onto a substrate, comprising a trigger finger arranged moveable between a contacting position and a resting position, wherein in the contacting position a side surface of an adjacent target can be physically contacted by the trigger finger, and in the resting position the adjacent target cannot be contacted by the trigger finger, wherein during cathodic arc deposition of a target material, the trigger finger is arranged movable between the contacting position and the resting position in such a way that the contamination of the trigger finger with deposited target material during the cathodic arc deposition of the target material can be minimized.
An arc ignition device for cathodic arc deposition of a target material onto a substrate, the arc ignition device comprising:
A method of sparking an arc for cathodic arc deposition of a material, the method comprising the steps of:
Use of an arc ignition device for cathodic arc deposition of a target material onto a substrate, the arc ignition device comprising:
Dependencies are inferred from the claim text.