Etching glass and glass ceramic materials in hydroxide containing molten salt
AssigneeCorning Incorporated
InventorsAlbert Joseph Fahey, Yuhui Jin
Life of this patent
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AssigneeCorning Incorporated
InventorsAlbert Joseph Fahey, Yuhui Jin
Estimating the term…
A method of etching a substrate comprises: contacting a substrate having a thickness with an etchant disposed in a vessel for a period of time until the thickness has reduced by at least 2 μm and at an average rate of 1 μm per minute to 6.7 μm per minute, the etchant having a temperature of 170° C. to 300° C. and comprising a molten mixture of two or more alkali hydroxides; and ceasing contacting the substrate with the etchant. The etchant in some instances comprises a molten mixture of NaOH and KOH. For example, the etchant in some instances includes a molten mixture of 24 wt. % to 72 wt. % NaOH, and 76 wt. % to 28 wt. % KOH. In some instances, the method alters the weight percentage of Na+, K+ and Li+ in the composition of the surface of the substrate by less than 1%.
A method of etching a substrate comprising:
Dependencies are inferred from the claim text.