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US 11,629,046 B2Granted
MEMS device
AssigneeMurata Manufacturing Co., Ltd.
InventorsKeiichi Umeda, Tadayuki Okawa, Taku Kamoto, Yuichi Goto, Yoshihisa Inoue, Takehiko Kishi
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Abstract
A MEMS device is provided that includes a piezoelectric film, a first electrode and a second electrode sandwiching the piezoelectric film, a protective film that covers at least part of the second electrode and having a cavity that opens part of the second electrode, a third electrode that contacts the second electrode at least in the cavity and is provided so as to cover at least part of the protective film, and a first wiring layer having a first contact portion in contact with the third electrode.
Claims14
A MEMS device comprising:
- a piezoelectric film;
- a first electrode and a second electrode sandwiching the piezoelectric film;
- a protective film that covers at least part of the second electrode and has a cavity that opens at least a part of the second electrode;
- a third electrode in contact with the second electrode at least in the cavity of the protective film and that covers at least part of the protective film;
- and
- a first wiring layer including a first contact portion in contact with the third electrode.
3 more elements
Dependencies are inferred from the claim text.