Liquid discharge head, liquid discharge device, and liquid discharge apparatus

A liquid discharge head, comprising:

• a nozzle plate having:
• a nozzle on a liquid discharge face of the nozzle plate;
• a through hole communicating with the nozzle and penetrating the nozzle plate;
• and
• a substrate including:
• a first silicon layer on a side of the liquid discharge face;
• a second silicon layer;
• a first silicon oxide film layer between the first silicon layer and the second silicon layer;
• and
• a second silicon oxide film layer on a first surface of the second silicon layer different from a second surface of the second silicon layer in contact with the first silicon oxide film layer;
• a channel plate separate from the nozzle plate, the channel plate defining an individual liquid chamber communicating with the nozzle via the through hole;
• and
• an actuator configured to pressurize a liquid in the individual liquid chamber to discharge the liquid from the nozzle, wherein
• a first thickness of the first silicon layer is smaller than a second thickness of the second silicon layer, and
• a first portion of the through hole penetrating the first silicon layer has a smaller diameter than a second portion of the through hole penetrating the second silicon layer.