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US 11,628,565 B2Granted
Substrate transport device and substrate transporting method
AssigneeUlvac, Inc.
InventorsKazuhiro Musha, Hirofumi Minami, Takayuki Suzuki
Life of this patent
Estimating the term…
Abstract
A substrate transport device includes an arm, an end effector coupled to the arm, a driver configured to lift the arm so that the end effector receives a substrate, and a controller configured to control an output of the driver to change a lifting speed of the arm. While lifting the arm at a first speed to lift the end effector toward the substrate, the controller changes the lifting speed to a second speed that is lower than the first speed when the end effector starts to raise a height position of the substrate.
Claims6
A substrate transport device, comprising:
- an arm;
- an end effector coupled to the arm;
- a driver configured to lift the arm so that the end effector receives a substrate;
- and
- a controller configured to control an output of the driver to change a lifting speed of the arm,
- wherein while lifting the arm at a first speed to lift the end effector toward the substrate, the controller changes the lifting speed to a second speed that is lower than the first speed upon the end effector starting to raise a height position of the substrate;
- and
- after the lifting speed is changed to the second speed, when a slight oscillation of the end effector caused by the lifting of the end effector changes from an oscillation in which only the end effector acts as an oscillator to an oscillation in which the end effector and the substrate act as oscillators, the controller increases the lifting speed from the second speed.
5 more elements
A substrate transporting method, comprising:
- lifting an end effector toward a substrate by lifting an arm coupled to the end effector at a first speed;
- changing a lifting speed of the arm to a second speed that is lower than the first speed upon the end effector starting to raise a height position of the substrate, and
- after the lifting speed is changed to the second speed, when a slight oscillation of the end effector caused by the lifting of the end effector changes from an oscillation in which only the end effector acts as an oscillator to an oscillation in which the end effector and the substrate act as oscillators, increasing via a controller the lifting speed from the second speed.
Dependencies are inferred from the claim text.