Processing apparatus for processing workpiece

A processing apparatus comprising:

• a chuck table having a holding face exposed upwardly and configured to suck and hold a plate-like workpiece placed on the holding face;
• a camera unit arranged above the chuck table and configured to image the workpiece held by the chuck table;
• and
• a processing unit configured to process the workpiece on a basis of an imaging result of the camera unit,
• wherein:
• the chuck table includes a holding portion that has an upper face configuring part of the holding face and causes a negative pressure to act upon the workpiece placed on the holding face, and a light passing portion that passes light, wherein the light passing portion comprises an internal space formed within the chuck table,
• the chuck table includes a frame body that extends below the internal space of the light passing portion,
• the light passing portion includes a first region that overlaps with the workpiece held by the chuck table,
• the light passing portion has a first mirror face that reflects light that advances from the first region into the light passing portion, and
• the camera unit is capable of imaging, by detecting light reflected by the first mirror face after having been reflected by a second region opposing to the first region of the workpiece held by the chuck table and advanced from the first region into the light passing portion, the second region of the workpiece.