Selective coating of a structure
AssigneeThe Regents of the University of California
InventorsChristopher Bates, Yuanyi Zhang
Life of this patent
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Abstract
A method of coating a structure is disclosed. Method steps include providing a structure having a first portion of a first material having a first surface and providing a second portion of a second material having a second surface, wherein a mask is provided over the first surface. Another step includes exposing the mask and the second surface to a solution comprising a polymer and a solvent, wherein the solution dewets from the mask and the polymer collects onto the second surface to form a polymer coating over the second surface without forming a polymer coating on the first surface.
Claims29
A method of selectively coating a structure comprising:
- providing a structure having:
- a first portion of a first material and having a first surface;
- a second portion of a second material and having a second surface,
- wherein a mask is over the first surface;
- cleaning the structure by sonification in at least one solvent;
- exposing the structure to ultraviolet ozone (UVO);
- dispensing a liquid solution comprising a polymer and a solvent onto the mask and the second surface, wherein the liquid solution has a chemistry tuned to transition from spin wetting to spin dewetting at a critical time as the solvent evaporates as the structure is spinning;
- and
- spinning the structure for at least the critical time to achieve the spin dewetting of the liquid solution from the first surface and the mask causing the polymer to collect onto the second surface to form a polymer coating over the second surface without forming a polymer coating over the first surface.
A method of selectively coating a structure comprising:
- providing a structure having:
- a first portion of a first material and having a first surface;
- a second portion of a second material and having a second surface;
- cleaning the structure by sonification in at least one solvent;
- exposing the structure to UVO;
- providing a liquid solution comprised of a polymer and a solvent, wherein the liquid solution has a tuned chemistry to transition from spin wetting to spin dewetting at a critical time as the solvent evaporates as the structure is spinning to coat the second surface, and a coupling agent having a chemistry to couple with the first material;
- dispensing the liquid solution onto the first surface and onto the second surface;
- and
- spinning the structure for at least the critical time, wherein the coupling agent couples to the first material to form a mask from which the liquid solution dewets during the spinning of the structure such that the polymer collects onto the second surface to form a polymer coating over the second surface without forming a polymer coating on the first surface.
Dependencies are inferred from the claim text.