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US 11,628,456 B2Granted
Apparatus for increasing flux from an ampoule
AssigneeApplied Materials, Inc.
InventorsKenric Choi, Xiaoxiong Yuan, Daping Yao, Mei Chang
Life of this patent
Estimating the term…
Abstract
Ampoules for a semiconductor manufacturing precursors and methods of use are described. The ampoules include a container with an inlet port and an outlet port. The inlet port has a showerhead that the end within the container. The showerhead has at least two angled nozzles to direct the flow of gas within the cavity so that the gas flow is not perpendicular to the surface of a liquid within the ampoule.
Claims20
A method of providing a flow of precursor, the method comprising:
- flowing a carrier gas through an inlet port of a precursor ampoule having a liquid precursor therein,
- directing the flow of the carrier gas within the ampoule with a showerhead at an end of the inlet port, the showerhead comprising at least two angled nozzles to direct the flow of gas at an angle not perpendicular to a surface of the liquid precursor;
- and
- flowing the carrier gas and precursor out of the ampoule through an outlet port, wherein the ampoule comprises a container having a bottom, sidewalls, and a lid, and the end of the inlet port is located a first orthogonal distance from the lid and the outlet port is located a second orthogonal distance from the lid, and the first orthogonal distance is larger than the second orthogonal distance.
1 more element
A method of providing a flow of precursor, the method comprising:
- flowing a carrier gas through an inlet port of a precursor ampoule having a liquid precursor therein, the inlet port having at least two angled nozzles through an end of the inlet port located within a cavity of the ampoule;
- directing the flow of the carrier gas within the through the at least two angled nozzles to direct the flow of the carrier gas from any of the angled nozzles at an angle not perpendicular to a surface of the liquid precursor;
- and
- flowing the carrier gas and the precursor out of the ampoule through an outlet port, wherein the cavity is defined by a container having a bottom, sidewalls, and a lid, and the end of the inlet port is located a first orthogonal distance from the lid and the outlet port is located a second orthogonal distance from the lid, and the first orthogonal distance is larger than the second orthogonal distance.
1 more element
Dependencies are inferred from the claim text.