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US 11,628,406 B2Granted
Fabricating calcite nanofluidic channels
AssigneeSaudi Arabian Oil Company
InventorsDong Kyu Cha, Mohammed Badri AlOtaibi, Sultan Muhammad Al Enezi, Ali Abdallah Al-Yousef
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Abstract
A method for fabricating calcite channels in a nanofluidic device is described. A porous membrane is attached to a substrate. Calcite is deposited in porous openings in the porous membrane attached to the substrate. A width of openings in the deposited calcite is in a range from 50 to 100 nanometers (nm). The porous membrane is etched to remove the porous membrane from the substrate to form a fabricated calcite channel structure. Each channel has a width in the range from 50 to 100 nm.
Claims10
A system comprising:
- a nanofluidic calcite chip that includes a substrate and a fabricated calcite channel structure, wherein the fabricated calcite channel structure is created by etching a porous membrane attached to the substrate to remove the porous membrane from the substrate, wherein the etching leaves, as remaining to form the fabricated calcite channel structure, calcite previously deposited in the porous membrane, and wherein a width of openings in the calcite is in a range from 50 to 100 nanometers (nm);
- and
- an SEM chamber including an SEM sample stage for holding the nanofluidic calcite chip;
- and;
- an electron beam gun configured to emit electrons through the nanofluidic calcite chip to produce images while a fluid is being passed through the nanofluidic calcite chip.
2 more elements
Dependencies are inferred from the claim text.