Device emitting or detecting terahertz waves, and manufacturing method for device

A manufacturing method for a device provided with an antenna array having a plurality of antennas, the method comprising:

• a step of forming, on a substrate, a semiconductor layer having terahertz-wave gain;
• a step of forming, on the substrate, a first conductor layer;
• a step of forming a shunt device electrically connected in parallel to a semiconductor layer of each of two antennas, and electrically connected to a coupling line for mutual frequency-locking of the plurality of antennas at the frequency of the terahertz waves;
• and
• a step of forming a third conductor layer to form the coupling line that has a structure where a first dielectric layer is sandwiched between the first conductor layer and the third conductor layer.

A device comprising:

• an antenna array provided with a plurality of antennas each having a semiconductor layer having terahertz-wave gain;
• and
• a coupling line for mutual frequency-locking of at least two of the antennas at a frequency of the terahertz waves,
• wherein the coupling line is electrically connected to a shunt device,
• wherein the shunt device is electrically connected in parallel to the semiconductor layer of each of the two antennas, and
• wherein each of the plurality of antennas includes:
• a substrate;
• a first conductor layer stacked on the substrate;
• the semiconductor layer electrically connected to the first conductor layer;
• a second conductor layer electrically connected to the semiconductor layer and facing the first conductor layer across the semiconductor layer;
• and
• a dielectric layer formed between the first conductor layer and the second conductor layer.