Liquid processing apparatus and liquid processing method
AssigneeSugino Machine Limited
InventorAkihiro Tanii
Life of this patent
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Abstract
Provided is a liquid processing apparatus and a liquid processing method for reducing a waste amount of a high specific gravity liquid. The liquid processing apparatus includes: a supply pump; a bubble tank including an inflow port, an overflow port, and a return port; a microbubble generator disposed outside the bubble tank; a recovery tank having a recovery port to recover the processing liquid overflown from a first liquid level to the tank; a separation tank including a settling tank connected to the overflow port, and a floating tank connected to the settling tank at a lower portion, and an ejector having a inlet port connected to the supply pump, a suction port connected the suction body, and a discharge port connected to the return port.
Claims20
A liquid processing apparatus, comprising:
- a supply pump configured to supply a processing liquid stored in a tank;
- a bubble tank including
- an inflow port,
- an overflow port, and
- a return port;
- a microbubble generator disposed outside the bubble tank and connected to the inflow port, the microbubble generator configured to generate microbubbles by mixing air to a part of the processing liquid supplied from the supply pump;
- a recovery tank connected to the bubble tank at a lower portion, the recovery tank having a recovery port configured to recover the processing liquid overflown from a first liquid level to the tank;
- a separation tank including
- a settling tank connected to the overflow port, the processing liquid and floating matter flowing into the settling tank, and
- a floating tank connected to the settling tank at a lower portion, the floating tank having a suction body disposed at a height of a second liquid level that is lower than the first liquid level;
- and
- an ejector having
- a first inlet port connected to the supply pump, other part of the processing liquid being supplied to the first inlet port,
- a suction port connected the suction body, and
- a discharge port connected to the return port.
A liquid processing method, comprising:
- mixing microbubbles of air, outside a bubble tank, into a part of a processing liquid containing floating matter stored in a tank;
- flowing the processing liquid mixed with the microbubbles into the bubble tank;
- floating the microbubbles to be adhered with the floating matter inside the bubble tank;
- flowing the processing liquid into a recovery tank through a lower portion of the bubble tank;
- recovering the processing liquid from the recovery tank to the tank;
- overflowing the processing liquid and the floating matter from an upper portion of a first liquid level of the bubble tank into a settling tank;
- separating the floating matter from the processing liquid by settling or floating inside the settling tank;
- flowing the processing liquid from a lower portion of the settling tank into a floating tank;
- ejecting the other part of the processing liquid stored in the tank inside an ejector;
- discharging the processing liquid sucked from an upper layer portion of the floating tank into the ejector together with the other part of ejected processing liquid to be returned to the bubble tank;
- and
- draining the floating matter settled inside the settling tank.
Dependencies are inferred from the claim text.