Compact proximity focused image sensor
AssigneeEOTech, LLC
InventorsKenneth Costello, Kevin Roderick, Verle Aebi
Life of this patent
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Abstract
An image sensor has a photocathode window assembly, an anode assembly, and a malleable metal seal. The photocathode window assembly has a photocathode layer. The anode assembly includes a silicon substrate that has an electron sensitive surface. The malleable metal seal bonds the photocathode window assembly and the silicon substrate to each other. A vacuum gap separates the photocathode layer from the electron sensitive surface. A first electrical connection and a second electrical connection are for a voltage bias of the photocathode layer relative to the electron sensitive surface.
Claims18
A vacuum proximity focused image sensor comprising:
- a photocathode window assembly having a face with one or more raised features and a photocathode layer;
- an anode assembly comprising a silicon substrate having an electron sensitive surface;
- a malleable metal seal bonding the photocathode window assembly and the silicon substrate to each other, forming a vacuum gap that separates the photocathode layer of the photocathode window assembly and the electron sensitive surface of the silicon substrate of the anode assembly by a gap height defined by the one or more raised features of the face of the photocathode window assembly;
- a first electrical connection to the photocathode layer, for a voltage bias;
- and
- a second electrical connection to the electron sensitive surface, for the voltage bias;
- wherein the malleable metal seal is formed such that a first end of the first electrical connection is at the photocathode layer, a second end of the first electrical connection is outside the vacuum gap, a first end of the second electrical connection is at the electron sensitive surface, and a second end of the second electrical connection is outside the vacuum gap.
A vacuum proximity focused image sensor comprising:
- a photocathode window assembly having a photocathode layer;
- an anode assembly comprising a silicon substrate having an electron sensitive surface;
- a malleable metal seal bonding the photocathode window assembly and the silicon substrate to each other, forming a vacuum gap that separates the photocathode layer of the photocathode window assembly and the electron sensitive surface of the silicon substrate of the anode assembly, the vacuum gap having a gap height defined by a thickness of the malleable metal seal;
- a first electrical connection to the photocathode layer, for a voltage bias;
- and
- a second electrical connection to the electron sensitive surface, for the voltage bias.
Dependencies are inferred from the claim text.