Optical device and optical detection system

An optical device comprising:

• a first substrate that has a surface which extends in a first direction and a second direction intersecting the first direction;
• a second substrate that faces the first substrate;
• a plurality of separation walls that are positioned between the first substrate and the second substrate and that extend in the first direction;
• one or more first optical waveguides that are positioned between the first substrate and the second substrate;
• and
• one or more spacers that are directly or indirectly sandwiched between the first substrate and the second substrate, that support the first substrate or the second substrate, and that are positioned around the one or more first optical waveguides,
• wherein the plurality of separation walls include a different material from the first substrate,
• wherein a modulus of elasticity of each of the one or more spacers is smaller than a modulus of elasticity of any one of the plurality of separation walls, and
• wherein each of the plurality of separation walls and each of the one or more spacers are not in direct contact with each other.

An optical device comprising:

• a first substrate that has a surface which extends in a first direction and a second direction intersecting the first direction;
• a second substrate that faces the first substrate;
• a plurality of separation walls that are positioned between the first substrate and the second substrate and that extend in the first direction;
• one or more first optical waveguides that are positioned between the first substrate and the second substrate;
• and
• one or more spacers that are directly or indirectly sandwiched between the first substrate and the second substrate, that support the first substrate or the second substrate, and that are positioned around the one or more first optical waveguides,
• wherein the plurality of separation walls include a different material from the first substrate,
• wherein a modulus of elasticity of each of the one or more spacers is smaller than a modulus of elasticity of any one of the plurality of separation walls, and
• wherein the first direction and the second direction forms a plane, and a dimension of each of the one or more spacers in the direction perpendicular to the plane is greater than a dimension of each of the plurality of the separation walls in the direction perpendicular to the plane.

An optical device comprising:

• a first substrate that has a surface which extends in a first direction and a second direction intersecting the first direction;
• a second substrate that faces the first substrate;
• a plurality of separation walls that are positioned between the first substrate and the second substrate and that extend in the first direction;
• one or more first optical waveguides that are positioned between the first substrate and the second substrate;
• and
• one or more spacers that are directly or indirectly sandwiched between the first substrate and the second substrate, that support the first substrate or the second substrate, and that are positioned around the one or more first optical waveguides,
• wherein a modulus of elasticity of each of the one or more spacers is smaller than a modulus of elasticity of any one of the plurality of separation walls, and
• wherein the first direction and the second direction forms a plane, and a dimension of each of the one or more spacers in the direction perpendicular to the plane is greater than a dimension of each of the plurality of the separation walls in the direction perpendicular to the plane.