X-ray photoemission system for 3-D laminography

A system for computed laminography, comprising:

• a source of x-rays;
• a vacuum chamber;
• a window that allows the transmission of x-rays into the vacuum chamber;
• a stage for holding at least one integrated device, positioned inside the vacuum chamber;
• a photoemissive structure within the vacuum chamber designed to emit electrons when exposed to x-rays;
• a means for directing the x-rays from the source of x-rays through the window and onto at least one integrated device held on the stage;
• a means of adjusting the position and orientation angle of the x-rays relative to the stage holding the integrated device;
• an electron optical system within the vacuum chamber, designed to form a magnified image of electrons emitted from the photoemissive structure;
• a means of converting the magnified image into one or more electronic signals;
• a means of recording the electronic signals corresponding to the images;
• a system controller that directs at least:
• the means of adjusting the position and orientation angle of the x-rays, motion of the stage holding the integrated device, and
• the means of recording the electronic signals corresponding to the images;
• wherein the system controller directs the means of adjusting the position and angle of the x-rays to produce images at multiple angles of incidence, allowing recording of multiple sets of electronic signals corresponding to said images at a series of angles and positions;
• and
• a processor to determine information about the height of one or more features in the at least one integrated device held on the stage, the information determined using the multiple sets of electronic signals.