Surface acoustic wave device
AssigneeSkyworks Solutions, Inc.
InventorsGong Bin Tang, Rei Goto, Hiroyuki Nakamura
Life of this patent
Estimating the term…
Abstract
Aspects of this disclosure relate to a surface acoustic wave device. The surface acoustic wave device includes a piezoelectric layer and an interdigital transducer. The interdigital transducer electrode includes a pair of electrodes, each electrode having a bus bar and fingers extending from the bus bar. The interdigital transducer electrode has an interdigital region defined by a portion of the fingers of the electrodes that interdigitate with each other. A dielectric layer is disposed over the interdigital transducer electrode outside the interdigital region and configured to reduce a loss of the surface acoustic wave device.
Claims20
A surface acoustic wave device comprising:
- a piezoelectric layer;
- an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode including a pair of electrodes, each electrode having a bus bar and fingers extending from the bus bar, the interdigital transducer electrode having an interdigital region defined by a portion of the fingers of the electrodes that interdigitate with each other;
- a dielectric layer disposed over the interdigital transducer electrode outside the interdigital region and configured to reduce a loss of the surface acoustic wave device;
- a functional layer below the piezoelectric layer and a support substrate layer below the functional layer.
A surface acoustic wave device comprising:
- a piezoelectric layer;
- an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode including a pair of electrodes, each electrode having a bus bar and fingers extending from the bus bar, the interdigital transducer electrode having an interdigital region defined by a portion of the fingers of the electrodes that interdigitate with each other;
- and
- a dielectric layer disposed over the interdigital transducer electrode outside the interdigital region and configured to reduce a loss of the surface acoustic wave device, the dielectric layer disposed over a dummy region of the interdigital transducer electrode.
A surface acoustic wave device comprising:
- a piezoelectric layer;
- an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode including a pair of electrodes, each electrode having a bus bar and fingers extending from the bus bar, the interdigital transducer electrode having an interdigital region defined by a portion of the fingers of the electrodes that interdigitate with each other;
- and
- a dielectric layer disposed over the interdigital transducer electrode outside the interdigital region and configured to reduce a loss of the surface acoustic wave device, the dielectric layer having a thickness of between 0.01L and 0.04L, L being a wavelength of a wave generated by the surface acoustic wave device.
An acoustic wave filter comprising:
- a surface acoustic wave resonator configured to filter a radio frequency signal, the surface acoustic wave resonator including a piezoelectric layer, an interdigital transducer electrode including a pair of electrodes, each electrode having a bus bar and fingers extending from the bus bar, the interdigital transducer electrode having an interdigital region defined by a portion of the fingers of the electrodes that interdigitate with each other, a dielectric layer disposed over the interdigital transducer electrode outside the interdigital region and configured to reduce a loss of the surface acoustic wave resonator, and a functional layer below the piezoelectric layer and a support substrate layer below the functional layer, and the functional layer is a silicon dioxide layer.
A wireless communication device comprising:
- an antenna;
- and
- a front end module including one or more surface acoustic wave resonators configured to filter a radio frequency signal associated with the antenna, each surface acoustic wave resonator including a piezoelectric layer, an interdigital transducer electrode including a pair of electrodes, each electrode having a bus bar and fingers extending from the bus bar, the interdigital transducer electrode having an interdigital region defined by a portion of the fingers of the electrodes that interdigitate with each other, and a dielectric layer disposed over the interdigital transducer electrode outside the interdigital region and configured to reduce a loss of the surface acoustic wave resonator, the dielectric layer having a thickness of between 0.01L and 0.04L, L being a wavelength of a wave generated by the one or more surface acoustic wave resonators.
Dependencies are inferred from the claim text.