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US 11,615,922 B2Granted
Capacitive element and plasma processing device
AssigneeNissin Electric Co., Ltd.
InventorsDongwei Li, Yasunori Ando
Life of this patent
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Abstract
A capacitive element using a liquid as a dielectric, whereby the capacitance is prevented from changing. The capacitive element is equipped with: a storage container that has an inlet port for introducing a liquid serving as a dielectric, has an outlet port for discharging the liquid, and is filled with the liquid; and at least one pair of electrodes that are provided in the storage container and face each other, wherein an opening section for exhausting air bubbles in the storage container is formed in an upper wall of the storage container.
Claims8
A capacitive element comprising:
- a storage container which is provided with an inlet port for introducing a liquid serving as a dielectric and an outlet port for discharging the liquid and is filled with the liquid;
- and
- at least a pair of electrodes which are provided inside the storage container and face each other,
- wherein one of the pair of electrodes is a fixed electrode, the other of the pair of electrodes is a movable electrode movable with respect to the fixed electrode, and its capacitance is variable, and
- wherein an upper wall of the storage container is provided with an opening section exhausting air bubbles in the storage container.
2 more elements
Dependencies are inferred from the claim text.