Inspection device and method for operating inspection device
AssigneeTokyo Electron Limited
InventorsYasuhiro Osuga, Koju Yamamoto
Life of this patent
Estimating the term…
Abstract
An inspection device according to an embodiment can conduct high temperature inspection and low temperature inspection on an object to be inspected. The inspection device includes an inspection chamber in which inspection is conducted on the object; a dry air supply section that is connected to the inspection chamber via a first valve and that is configured to supply dry air into the inspection chamber; a dew point meter that is connected to the inspection chamber via a second valve and that is configured to measure a dew point in the inspection chamber; and a bypass pipe connecting the dry air supply section and the dew point meter via a third valve.
Claims8
An inspection device comprising:
- an inspection chamber in which inspection is conducted on an object to be inspected;
- a dry air supply section connected to the inspection chamber via a first valve, the dry air supply section being configured to supply dry air into the inspection chamber;
- a dew point meter connected to the inspection chamber via a second valve, the dew point meter being configured to measure a dew point in the inspection chamber;
- and
- a bypass pipe connecting the dry air supply section and the dew point meter via a third valve, and
- a controller configured to control opening and closing operations of the first valve, the second valve, and the third valve, in accordance with a type of inspection conducted on the object to be inspected,
- wherein the controller is configured to control the opening and closing operations of the first valve, the second valve, and the third valve, in order to supply the dry air from the dry air supply section to the dew point meter via the bypass pipe without supplying the dry air from the dry air supply section to the inspection chamber, based on a temperature in the inspection chamber.
An inspection device comprising:
- an inspection chamber in which inspection is conducted on an object to be inspected;
- a dry air supply section connected to the inspection chamber via a first valve, the dry air supply section being configured to supply dry air into the inspection chamber;
- a dew point meter connected to the inspection chamber via a second valve, the dew point meter being configured to measure a dew point in the inspection chamber;
- and
- a bypass pipe connecting the dry air supply section and the dew point meter via a third valve,
- a controller configured to control opening and closing operations of the first valve, the second valve, and the third valve, in accordance with a type of inspection conducted on the object to be inspected,
- wherein the dew point meter is connected to the inspection chamber via a dew point meter pipe, and
- wherein the controller is configured to control the opening and closing operations of the first valve, the second valve, and the third valve, in order to supply the dry air from the dry air supply section to the dew point meter via the dew point meter pipe by the dry air supply section supplying the dry air to the inspection chamber, based on a temperature in the inspection chamber.
An inspection device comprising:
- an inspection chamber in which inspection is conducted on an object to be inspected;
- a dry air supply section connected to the inspection chamber via a first valve, the dry air supply section being configured to supply dry air into the inspection chamber;
- a dew point meter connected to the inspection chamber via a second valve, the dew point meter being configured to measure a dew point in the inspection chamber;
- and
- a bypass pipe connecting the dry air supply section and the dew point meter via a third valve, and
- a controller configured to control opening and closing operations of the first valve, the second valve, and the third valve, in accordance with a type of inspection conducted on the object to be inspected,
- wherein, in response to detecting that a temperature in the inspection chamber decreases, the controller is configured to control the opening and closing operations of the first valve, the second valve, and the third valve,
- such that the dry air is supplied into the inspection chamber for a predetermined period of time, the predetermined period of time being determined based on a relationship between an elapsed time since the dry air is supplied into the inspection chamber and a dew point in the inspection chamber, and
- such that the dry air having been supplied to the inspection chamber is supplied to the dew point meter connected to the inspection chamber, after the predetermined period of time has elapsed.
A method of operating an inspection device including an inspection chamber in which inspection is conducted on an object to be inspected, a dry air supply section connected to the inspection chamber via a first valve and configured to supply dry air into the inspection chamber, a dew point meter connected to the inspection chamber via a second valve and configured to measure a dew point in the inspection chamber, and a bypass pipe connecting the dry air supply section and the dew point meter via a third valve;
- the method comprising:
- controlling opening and closing operations of the first valve, the second valve, and the third valve, in order to supply the dry air from the dry air supply section to the dew point meter via the bypass pipe, without supplying the dry air from the dry air supply section to the inspection chamber, based on a temperature in the inspection chamber.
Dependencies are inferred from the claim text.