Physical quantity sensor, composite sensor, inertial measurement unit, vehicle positioning device, portable electronic device, electronic device, vehicle, traveling supporting system, display device, and manufacturing method for physical quantity sensor

A physical quantity sensor comprising:

• a physical quantity sensor module including:
• a substrate;
• a lid joined to the substrate to define a housing space in an inside, the lid having a recess, a through-hole being provided in a bottom of the recess;
• and
• a sensor element housed in the housing space and configured to detect a physical quantity;
• an electrode disposed at a peripheral area of the through-hole, the electrode continuously radically extending from a periphery of the through-hole to a top surface of the lid via the bottom and inner side wall of the recess;
• a sealing member sealing the through-hole and being partially filled in the recess with the electrode;
• and
• a circuit element bonded to the top surface of the lid and closing the recess of the lid via an adhesive material, wherein
• a thickness of a periphery of the electrode on the top surface of the lid is smaller than a thickness of the electrode on the bottom of the recess.