US 11,613,460 B1 · Systems, methods, and devices for mechanical isolation or mechanical damping of microfabricated inertial sensors

Abstract

MEMS-based sensors can experience undesirable signal frequencies caused by vibrations, shocks, and accelerations, among other phenomena. A microisolation system can isolate individual MEMS-based sensors from undesirable signal frequencies and shocks. An embodiment of a system for microisolation of a MEMS-based sensor can include an isolation platform connected to one or more folded springs. Another embodiment of a system for microisolation can include an isolation platform and/or a frame connected to a mesh damping mechanism. In at least one embodiment, a mesh damping mechanism can be a microfibrous metal mesh damper. In one or more embodiments, a system for microisolation can include an isolation platform connected to one or more L-shaped springs, and a thickness of the one or more L-shaped springs can be less than a thickness of the isolation platform.

Claims20

Dependent claims

An assembly for isolating a MEMS-based sensor, comprising:

an isolator platform configured to hold the MEMS-based sensor;
one or more springs affixed to the isolator platform;
a frame affixed to the one or more springs;
and
a mesh damper affixed to a bottom surface of the frame.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

17/241,148Filed 27 Apr 2021 · continuation

Priority

4 Oct 2018

Granted

28 Mar 2023

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

B81B 7/02
Microstructural systems ; Auxiliary parts of microstructural devices or systems: containing distinct electrical or optical devices of particular…
B81B 7/0016
Structural features, others than packages, for protecting a device against environmental influences: protection against shocks or vibrations, e.g.…
B81C 1/00674
Mechanical properties: treatments for improving wear resistance
B81B 2201/0235
Inertial sensors: accelerometers

Systems, methods, and devices for mechanical isolation or mechanical damping of microfabricated inertial sensors

Life of this patent

Systems, methods, and devices for mechanical isolation or mechanical damping of microfabricated inertial sensors

Life of this patent

Abstract

Claims20