Production method for trichlorosilane, and pipe
AssigneeTokuyama Corporation
InventorsKenji Hirota, Katsuya Ogihara
Life of this patent
Estimating the term…
Abstract
To prevent solidified aluminum chloride from adhering to and accumulating on a pipe and also prevent stress-corrosion cracking in the pipe, a method for producing trichlorosilane includes a cooling step of cooling a discharge gas that is discharged from a fluidized-bed reactor and that contains the trichlorosilane, the cooling step involving causing a fluid to flow through a space (4) inside a side wall (3) of a pipe (10), the pipe being a pipe for discharging the discharge gas from the fluidized-bed reactor, in such a manner that the side wall (3) has a surface (1a) having a temperature of not lower than 110° C.
Claims4
A method for producing trichlorosilane, the method comprising:
- a cooling step of cooling a discharge gas that is discharged from a fluidized-bed reactor configured to produce the trichlorosilane and that contains the trichlorosilane,
- in the cooling step,
- by causing a fluid to flow through a space inside a side wall of a pipe in such a manner that the side wall has a surface at a temperature of not lower than 110° C., the discharge gas being cooled so that in the pipe upstream of a lower end portion of the wall where the space is provided, the discharge gas flowing through the pipe is kept at a temperature of not lower than a sublimation temperature of aluminum chloride, the pipe being a pipe for discharging the discharge gas from the fluidized-bed reactor, the discharge gas flowing through the pipe being in contact with the surface.
Dependencies are inferred from the claim text.