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US 11,610,773 B2Granted
Condenser system for high pressure processing system
AssigneeApplied Materials, Inc.
InventorJean Delmas
Life of this patent
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Abstract
Embodiments described herein relate to a high pressure processing system with a condenser and methods for utilizing the same. The processing system includes a process chamber, a boiler, a condenser, and one or more heat exchangers. The boiler generates a fluid, such as a vapor or supercritical fluid, and delivers the fluid to the process chamber where a substrate is processed. After processing the substrate, the system is depressurized and the fluid is delivered to the condenser where the fluid is condensed.
Claims17
A substrate process method, comprising:
- heating a boiler in fluid communication with a process chamber, a condenser, and a fluid collection unit;
- closing a boiler valve disposed on a conduit connecting the boiler and the process chamber;
- opening valves disposed on conduits connecting the fluid collection unit and the process chamber;
- positioning a substrate in the process chamber;
- heating the process chamber;
- closing the valves disposed on conduits connecting the fluid collection unit and the process chamber;
- opening the boiler valve to enable fluid flow between the boiler and the process chamber;
- flowing a heated fluid from the boiler to the process chamber;
- processing the substrate with the heated fluid;
- opening valves disposed on conduits connecting the condenser and the process chamber process to enable fluid flow between the process chamber and the condenser;
- and
- depressurizing the process chamber by flowing the heated fluid from the process chamber to the condenser.
9 more elements
Dependencies are inferred from the claim text.