Pressure sensor
AssigneeAzbil Corporation
InventorsTomohisa Tokuda, Kouji Yuuki, Tatsuo Tanaka
Life of this patent
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Abstract
The present disclosure enables measurement with satisfactory sensitivity in a low pressure range, and thus accurate measurement in a wider pressure range, by providing a pressure sensor that includes a diaphragm layer and a pressure receiving region formed in the diaphragm layer. In addition, the pressure sensor includes a first piezostrictive element, a second piezostrictive element, a third piezostrictive element, and a fourth piezostrictive element. In addition, the pressure sensor includes a first magnetostrictive element, a second magnetostrictive element, a third magnetostrictive element, and a fourth magnetostrictive element.
Claims20
A pressure sensor comprising:
- a diaphragm layer;
- a pressure receiving region formed in the diaphragm layer;
- a piezostrictive measurement unit provided in the diaphragm layer in an outer peripheral portion of the pressure receiving region, and formed of a piezostrictive element that measures a strain of the pressure receiving region by using a piezoresistance effect;
- and
- a magnetostrictive measurement unit provided in the pressure receiving region of the diaphragm layer, and formed of a magnetostrictive element that is formed of a material whose magnetization is changed due to the strain, and that measures the strain of the pressure receiving region.
Dependencies are inferred from the claim text.