Piezoelectric device, liquid discharge head, liquid discharge device, and method for manufacturing piezoelectric device
AssigneeSeiko Epson Corporation
InventorToshihiro Shimizu
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AssigneeSeiko Epson Corporation
InventorToshihiro Shimizu
Estimating the term…
A piezoelectric device includes a piezoelectric body, a vibration plate that vibrates when the piezoelectric body is driven, a first electrode positioned between the piezoelectric body and the vibration plate, and a second electrode positioned to be separated from the first electrode by the piezoelectric body. The piezoelectric body has an active portion that is a part sandwiched between the first electrode and the second electrode in a first direction along a thickness direction of the piezoelectric body, and a change width of a dC/dV value, which represents a change in capacitance with respect to a change in a voltage applied along a second direction orthogonal to the first direction, from one end of the active portion on a side of the first electrode to the other end of the active portion on a side of the second electrode in the first direction is 10% or less.
A piezoelectric device comprising:
Dependencies are inferred from the claim text.