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US 11,606,078 B2Granted
Acoustic wave resonator with rotated and tilted interdigital transducer electrode
AssigneeSkyworks Solutions, Inc.
InventorsGong Bin Tang, Rei Goto
Life of this patent
Estimating the term…
Abstract
Acoustic wave resonators are disclosed that include a piezoelectric layer and an interdigital transducer electrode over the piezoelectric layer. The interdigital transducer electrode has a rotation angle and a tilt angle. The rotation angle and the tilt angle can together increase a figure of merit of the acoustic wave device. The rotation angle and the tilt angle can both be non-zero.
Claims20
An acoustic wave resonator with increased figure of merit, the acoustic wave resonator comprising:
- a piezoelectric layer;
- and
- an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a rotation angle and a tilt angle, the rotation angle and the tilt angle both being non-zero, and the rotation angle and the tilt angle together configured to cause an increase in a figure of merit of the acoustic wave resonator relative to a configuration having a zero rotation angle and a zero tilt angle, a sum of the rotation angle and the tilt angle being in a range from 2° to 14°.
An acoustic wave resonator comprising:
- a multilayer piezoelectric substrate including a support substrate and a piezoelectric layer over the support substrate;
- and
- an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a rotation angle and a tilt angle, the rotation angle and the tilt angle both being non-zero, and the rotation angle and the tilt angle together configured to cause a transverse mode to be suppressed, a sum of the rotation angle and the tilt angle being in a range from 2° to 14°.
An acoustic wave filter comprising:
- a first acoustic wave resonator including a piezoelectric layer and an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a rotation angle and a tilt angle, the rotation angle and the tilt angle both being non-zero, and the rotation angle and the tilt angle together configured to cause an increase in a figure of merit of the acoustic wave resonator relative to a configuration having a zero rotation angle and a zero tilt angle, a sum of the rotation angle and the tilt angle being in a range from 2° to 14°;
- and
- a plurality of other acoustic wave resonators, the first acoustic wave resonator and the plurality of other acoustic wave resonators together arranged to filter a radio frequency signal.
Dependencies are inferred from the claim text.