Isolator

Abstract

An isolator includes a lower electrode, a first insulating layer, a second insulating layer, an upper electrode, and a low permittivity portion. The first insulating layer is provided on the lower electrode, and includes a protruding portion in an upper portion of the first insulating layer. The second insulating layer is provided on the protruding portion, extends sideways from a region directly above the protruding portion, and has a specific permittivity higher than a specific permittivity of the first insulating layer. The upper electrode is in contact with an upper surface of the second insulating layer. The low permittivity portion is in contact with a side surface of the protruding portion and a lower surface of the second insulating layer. The low permittivity portion has a specific permittivity lower than the specific permittivity of the first insulating layer.

Dependencies are inferred from the claim text.