Flexible substrate and manufacturing method thereof, panel and electronic device

A manufacturing method of a flexible substrate, comprising:

• providing a base substrate;
• forming a first inorganic layer on the base substrate;
• forming a first groove on a surface, which is away from the base substrate, of the first inorganic layer;
• and
• forming a first organic layer in contact with the first inorganic layer on the first inorganic layer;
• the method further comprises forming a function layer on the first organic layer, the function layer is a driving circuit layer or a light emitting layer, and the function layer comprises a working region and a non-working region outside the working region,
• the non-working region comprises a bending region;
• the first groove is recessed along a direction away from the function layer;
• an orthographic projection of the first groove on the function layer at least partially overlaps with the non-working region, and a portion, overlapping with the non-working region, of the orthographic projection of the first groove on the function layer is in the bending region.