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US 11,604,371 B2Granted
Electro-optical modulator and methods of formation thereof
AssigneeSTMicroelectronics (Crolles 2) SAS
InventorCharles Baudot
Life of this patent
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Abstract
In one embodiment, an electro-optical modulator includes a waveguide having a first major surface and a second major surface opposite the first major surface. A cavity is disposed in the waveguide. Multiple quantum wells are disposed in the cavity.
Claims20
A method of manufacturing an electro-optical modulator comprising a waveguide, the method comprising:
- etching a cavity into the waveguide, wherein etching the cavity comprises etching the cavity with slanted sidewalls;
- and
- filling the cavity by forming multiple quantum wells by an epitaxial deposition process.
A method of manufacturing an electro-optical modulator, the method comprising:
- forming a cavity extending from a first major surface of a waveguide towards a second major surface of the waveguide, the waveguide being configured to transmit light in a first direction, the cavity having sidewalls inclined with respect to the normal to the second major surface of the waveguide, and wherein a normal to the sidewalls is along a second direction orthogonal to the first direction;
- and
- forming multiple quantum wells within the cavity.
A method of manufacturing an electro-optical modulator, the method comprising:
- forming a band oriented along a first direction, the band comprising an upstream portion, an intermediate portion, and a downstream portion, the first direction being along a light transmission direction of a waveguide;
- forming a first strip oriented along the first direction and disposed on a first side of the band;
- forming a second strip oriented along the first direction and disposed on a second side of the band, the band, the first and the second strips being disposed in a silicon layer of a substrate;
- forming a cavity disposed in the intermediate portion of the band, the cavity comprising slanted sidewalls, wherein a normal to the slanted sidewalls is along a second direction orthogonal to the first direction;
- and
- forming multiple quantum wells disposed in the cavity.
3 more elements
Dependencies are inferred from the claim text.