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US 11,603,470 B2Granted
Method for manufacturing granulated silica
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsMasanobu Nishimine, Tomoya Ogata, Daichi Todoroki, Tsutomu Nakamura, Susumu Ueno
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Abstract
A method for manufacturing granulated silica. The method includes granulating silica powders each having a primary particle size of 5 to 50 nm by use of water, and hydrophobizing each surface of the silica powders with a silicon atom-containing hydrophobizing agent before or simultaneously with the granulation step.
Claims5
A method for manufacturing granulated silica, comprising:
- a granulation step of granulating silica powders each having a primary particle size of 5 to 50 nm by use of water, where a mass ratio of the water to the silica powders being set to 0.6 to 5 of water with respect to 1 of the silica powders,
- a drying step of removing water used for the granulating after the granulation step,
- a heat treatment step of heating the granulated silica at a temperature of 150 to 300° C. after the drying step, and
- hydrophobizing each surface of the silica powders with a silicon atom-containing hydrophobizing agent before or simultaneously with the granulation step.
1 more element
Dependencies are inferred from the claim text.