Electrode assemblies for plasma discharge devices
AssigneeMecanique Analytique Inc.
InventorsYves Gamache, André Lamontagne
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Abstract
There is provided a compound electrode assembly for generating a plasma in a plasma chamber of a plasma discharge device. The compound electrode assembly includes a casing, a discharge electrode and a sealing compound. The casing is made of a dielectric material and includes at least one side wall and an end wall defining a closed end. The discharge electrode is mounted in the casing and is bonded to the end wall. The sealing compound surrounds the discharge electrode and extends within the casing.
Claims22
A compound electrode assembly for generating a plasma in a plasma chamber of a plasma discharge device, the compound electrode assembly comprising:
- a casing made of a dielectric material, the casing comprising at least one side wall and an end wall defining a closed end;
- a discharge electrode mounted in the casing, the discharge electrode being bonded to the end wall, wherein the discharge electrode is bonded to the end wall with an electrically conductive adhesive or a layer of conductive compound, extending along an inside surface of the end wall;
- and
- a sealing compound surrounding the discharge electrode and extending within the casing.
A plasma discharge device, comprising:
- a plasma chamber traversed by a gas flow path allowing a flow of a gas sample through the plasma chamber;
- and
- at least one compound electrode assembly, each of said at least one compound electrode assembly comprising:
- a casing made of a dielectric material, the casing comprising at least one side wall and an end wall defining a closed end;
- a discharge electrode mounted in the casing, the discharge electrode being bonded to the end wall;
- a sealing compound surrounding the discharge electrode and extending within the casing;
- and
- wherein said at least one compound electrode assembly is a pair of compound electrode assemblies, the pair of compound electrode assemblies being separated by an adjustable interelectrode spacing.
A compound electrode assembly for generating a plasma in a plasma chamber of a plasma discharge device, the compound electrode assembly comprising:
- a casing made of a dielectric material, the casing comprising at least one side wall and an end wall defining a closed end;
- a discharge electrode mounted in the casing, the discharge electrode being bonded to the end wall;
- a sealing compound surrounding the discharge electrode and extending within the casing;
- and
- a pair of stabilizing electrodes, each stabilizing electrode being located within the casing and being bonded to an inside surface of the end wall alongside the discharge electrode.
A compound electrode assembly for generating a plasma in a plasma chamber of a plasma discharge device, the compound electrode assembly comprising:
- a casing made of a dielectric material, the casing comprising at least one side wall and an end wall defining a closed end;
- a discharge electrode mounted in the casing, the discharge electrode being bonded to the end wall;
- a sealing compound surrounding the discharge electrode and extending within the casing;
- and
- an electron injection electrode mounted outside of the casing and along the side wall, the electron injection electron being configured to enable injection of free electron in the plasma chamber, the electron injection electrode being mounted on the outside of the casing with an electrically conductive adhesive, a layer of conductive compound or a ceramic-based bonding compound.
Dependencies are inferred from the claim text.