Apparatus and method for generating extreme ultraviolet radiation
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Huan Chen, Yu-Chih Huang, Ming-Hsun Tsai, Shang-Chieh Chien, Heng-Hsin Liu
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Abstract
A target droplet source for an extreme ultraviolet (EUV) source includes a droplet generator configured to generate target droplets of a given material. The droplet generator includes a nozzle configured to supply the target droplets in a space enclosed by a chamber. In some embodiments, a nozzle tube is arranged within the nozzle of the droplet generator, and the nozzle tube includes a structured nozzle pattern configured to provide an angular momentum to the target droplets.
Claims20
An extreme ultraviolet (EUV) radiation source comprising:
- an EUV generation chamber enclosing a space;
- a droplet generator configured to generate target droplets of a given material, the droplet generator comprising a nozzle configured to supply the target droplets in the space enclosed by the EUV generation chamber;
- and
- an excitation laser configured to heat the target droplets supplied by the nozzle to generate plasma, the excitation laser being focused at a focal position in the space enclosed by the EUV generation chamber, wherein:
- a nozzle tube is arranged within the nozzle of the droplet generator, and
- the nozzle tube includes a structured nozzle pattern configured to provide an angular momentum to the target droplets.
A target droplet source for an extreme ultraviolet (EUV) source, the target droplet source comprising:
- a droplet generator configured to generate target droplets of a given material, the droplet generator comprising a nozzle configured to supply the target droplets in a space enclosed by a chamber;
- and
- a structured nozzle tube having an inner surface comprising at least one of a groove or a projection configured to break bubbles or contaminant particles into smaller pieces.
A method of producing target droplets for generating laser produced plasma in an extreme ultraviolet (EUV) radiation source, the method comprising:
- generating target droplets of a given material in a droplet generator;
- supplying the generated target droplets through a nozzle of the droplet generator in a space enclosed by a chamber;
- and
- providing an angular momentum to the target droplets supplied through the nozzle using a structured nozzle tube with a structured nozzle pattern.
Dependencies are inferred from the claim text.