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US 11,600,773 B2Granted
Selector and non-volatile storage device
AssigneeKioxia Corporation
InventorsToshihiko Nagase, Daisuke Watanabe, Yoshitomo Kobayashi, Hiroki Tokuhira, Hiroki Kawai
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Abstract
A selector includes a first electrode, a second electrode, and a selector layer provided between the first electrode and the second electrode and contains SixTeyNz. The x, y, and z of the SixTeyNz satisfy 0<x≤35, 15≤y≤50, and 50<z≤85, satisfy 0<x≤45, 15≤y≤55, and 40<z≤85, or satisfy 0<x≤55, 15≤y≤65, and 30<z≤85.
Claims18
A selector comprising:
- a first electrode;
- a second electrode;
- and
- a selector layer provided between the first electrode and the second electrode, the selector layer containing SixTeyNz (x+y+z≤100) or SixTeyOwNz (w+x+y+z≤100),
- wherein the x, y, and z of the SixTeyNz satisfy the following:
- 0<x≤35, 15≤y≤50, and 50<z≤85,
- 0<x≤45, 15≤y≤55, and 40<z≤85, or
- 0<x≤55, 15≤y≤65, and 30<z≤85, and
- wherein the w, x, y, z of the SixTeyOwNz satisfy the following:
- 0<x≤35, 15≤y≤50, and 50<w+z≤85,
- 0<x≤45, 15≤y≤55, and 40<w+z≤85, or
- 0<x≤55, 15≤y≤65, and 30<w+z≤85,
- wherein the selector layer contains SixTeyNz, and the SixTeyNz has a Te bond ratio, the Te bond ratio being a ratio of the sum of the number of Te—Te bonds, the number of Te—Si bonds, and the number of Te—N bonds in the SixTeyNz to the sum of the number of Te—Te bonds, the number of Te—Si bonds, the number of Te—N bonds, the number of Si—Si bonds, the number of Si—N bonds, and the number of N—N bonds in the SixTeyNz, wherein the Te bond ratio is 20% or more,
- wherein the Te bond ratio does not exceed 70%.
11 more elements
A selector comprising:
- a first electrode;
- a second electrode;
- a selector layer provided between the first electrode and the second electrode, the selector layer containing Si, Te, and N, the selector layer having a top surface facing the first electrode, a bottom surface facing the second electrode, and at least one side surface between the top surface and the bottom surface;
- and
- a nitride layer provided between the first electrode and the selector layer, between the second electrode and the selector layer, and on an entirety of the at least one side surface of the selector layer.
2 more elements
Dependencies are inferred from the claim text.