Resistance variable device with chalcogen-containing layer
AssigneeKioxia Corporation
InventorsHiroki Kawai, Katsuyoshi Komatsu, Tadaomi Daibou, Hiroki Tokuhira, Masatoshi Yoshikawa, Yuichi Ito
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AssigneeKioxia Corporation
InventorsHiroki Kawai, Katsuyoshi Komatsu, Tadaomi Daibou, Hiroki Tokuhira, Masatoshi Yoshikawa, Yuichi Ito
Estimating the term…
A resistance variable device of an embodiment includes a stack arranged between a first electrode and a second electrode and including a resistance variable layer and a chalcogen-containing layer. The chalcogen-containing layer contains a material having a composition represented by a general formula: C1xC2yAz, where C1 is at least one element selected from Sc, Y, Zr, and Hf, C2 is at least one element selected from C, Si, Ge, B, Al, Ga, and In, A is at least one element selected from S, Se, and Te, and x, y, and z are numbers representing atomic ratios satisfying 0<x<1, 0<y<1, 0<z<1, and x+y+z=1, and when an oxidation number of the element C1 is set to a, and an oxidation number of the element C2 is set to b, the atomic ratio x of the element C1 satisfies x≤(3−(3+b)×y−z)/(3+a).
A resistance variable device, comprising:
A resistance variable device, comprising:
A resistance variable device, comprising:
Dependencies are inferred from the claim text.