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US 11,600,761 B2Granted
High critical temperature metal nitride layer with oxide or oxynitride seed layer
AssigneeApplied Materials, Inc.
InventorsZihao Yang, Mingwei Zhu, Shriram Mangipudi, Mohammad Kamruzzaman Chowdhury, Shane Lavan, Zhebo Chen, Yong Cao, Nag B. Patibandla
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Abstract
A superconducting device includes a substrate, a metal oxide or metal oxynitride seed layer on the substrate, and a metal nitride superconductive layer disposed directly on the seed layer. The seed layer is an oxide or oxynitride of a first metal, and the superconductive layer is a nitride of a different second metal.
Claims20
A superconducting device, comprising:
- a substrate;
- a metal oxide or metal oxynitride seed layer on the substrate, the seed layer being an oxide or oxynitride of a first metal;
- a metal nitride superconductive layer disposed directly on the seed layer, the superconductive layer being a nitride of a different second metal;
- and
- a distributed Bragg reflector between the substrate and the metal oxide or metal oxynitride seed layer.
2 more elements
A superconducting device, comprising:
- a substrate having a top surface;
- a metal oxide or metal oxynitride seed layer on the substrate, the seed layer being an oxide or oxynitride of a first metal;
- a metal nitride superconductive layer disposed directly on the seed layer, the superconductive layer being a nitride of a different second metal;
- and
- an optical waveguide between the substrate and the metal oxide or metal oxynitride seed layer to receive light propagating substantially parallel to the top surface of the substrate.
2 more elements
A superconducting device, comprising:
- a substrate;
- a lower seed layer on the substrate, the lower seed layer being a nitride of a first metal;
- an upper seed layer disposed directly on the lower seed layer, the upper seed layer being an oxide or oxynitride of the first metal;
- and
- a superconductive layer disposed directly on the upper seed layer, the superconductive layer being a nitride of a different second metal.
2 more elements
A superconducting device, comprising:
- a substrate;
- an aluminum nitride seed layer on the substrate;
- an aluminum oxide or aluminum oxynitride seed layer disposed directly on the aluminum nitride seed layer;
- and
- a superconductive layer disposed directly on the upper aluminum oxide or aluminum oxynitride seed layer, the superconductive layer being niobium nitride, titanium nitride, or niobium titanium nitride.
2 more elements
Dependencies are inferred from the claim text.