Replaceable end effector contact pads, end effectors, and maintenance methods

A contact pad adapted to be secured to an end effector body of an end effector, comprising:

• a contact pad head having a contact surface configured to contact a substrate;
• a shaft coupled to the contact pad head, the shaft including a shaft indent formed between an underside of the contact pad head and a shaft end;
• and
• a circular securing member of a circular shape that encircles the shaft and is seated in the shaft indent and configured to secure the contact pad to the end effector body, wherein the circular securing member is configured to provide a securing force enabling secure clamping of the underside of the contact pad head to a top surface of the end effector body.

A method of maintaining an end effector adapted to transport a substrate in electronic device manufacturing, comprising:

• providing an end effector body of the end effector having a top surface and a bottom surface, a recess extending into the end effector body from the bottom surface, and an aperture extending between the top surface and the recess;
• providing a contact pad having a contact pad head with a contact surface configured to contact and support the substrate, and a shaft coupled to the contact pad head, the shaft including a shaft indent formed between an underside of the contact pad head and a shaft end;
• providing a circular securing member;
• inserting the shaft through the aperture and into the recess;
• and
• securing the circular securing member of a circular shape that encircles the shaft and is seated in the shaft indent to secure the contact pad to the end effector body,
• wherein the circular securing member is configured to provide a securing force enabling secure clamping of the underside of the contact pad head to the top surface of the end effector body.