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US 11,600,537 B2Granted
Magnetic property measuring system, a method for measuring magnetic properties, and a method for manufacturing a magnetic memory device using the same
AssigneeSamsung Electronics Co., Ltd.
InventorEunsun Noh
Life of this patent
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Abstract
A magnetic property measuring system includes a stage configured to hold a sample and a magnetic structure disposed over the stage. The stage includes a body part, a magnetic part adjacent the body part, and a plurality of holes defined in the body part. The magnetic part of the stage and the magnetic structure are configured to apply a magnetic field, which is perpendicular to one surface of the sample, to the sample. The stage is configured to move horizontally in an x-direction and a y-direction which are parallel to the one surface of the sample.
Claims10
A system comprising:
- a stage configured to hold a sample, and including a body, a magnetic portion contacting the body and a plurality of holes disposed in at least one of the body and the magnetic portion;
- and
- a magnetic structure disposed over the stage,
- wherein the magnetic portion of the stage and the magnetic structure are configured to apply a magnetic field to the sample, and
- the stage is configured to move in a first direction and in a second direction.
2 more elements
Dependencies are inferred from the claim text.