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US 11,600,514 B2Granted
Substrate holding device
AssigneeEbara Corporation
InventorsMasaki Tomita, Junitsu Yamakawa
Life of this patent
Estimating the term…
Abstract
Provided is a substrate holding device that inhibits drop in holding accuracy of a substrate. A Bernoulli chucking pad suctions and holds a front surface or a back surface of a substrate S. A position determiner 54 is capable of pushing the substrate S in contact with a side surface 82 of the substrate S, and positioning the suctioned substrate S. A pin 66 enables the position determiner 54 to come in contact with the side surface 82 of the substrate S. The pin 66 brings the position determiner 54 into contact with the side surface 82 of the substrate S, and the position determiner 54 thereby positions the substrate S.
Claims12
A substrate holding device comprising:
- a suctioning member capable of suctioning and holding a front surface or a back surface of a substrate,
- a position determiner capable of pushing the substrate in contact with a side surface of the substrate, and positioning the suctioned substrate, and
- a driver that enables the position determiner to come in contact with the side surface of the substrate, wherein the driver brings the position determiner into contact with the side surface of the substrate, and the position determiner thereby positions the substrate,
- wherein a first portion of the driver is capable of coming in contact with the substrate,
- when the suctioning member suctions the front surface or the back surface of the substrate, the first portion comes in contact with the substrate, to apply a force to the driver, and the driver is movable, and
- when the driver moves, a second portion of the driver enables the position determiner to come in contact with the side surface of the substrate and to push the substrate.
3 more elements
A substrate holding device device comprising:
- a suctioning member capable of suctioning and holding a front surface or a back surface of a substrate,
- a position determiner capable of pushing the substrate in contact with a side surface of the substrate, and positioning the suctioned substrate, and
- a driver that enables the position determiner to come in contact with the side surface of the substrate, wherein the driver brings the position determiner into contact with the side surface of the substrate, and the position determiner thereby positions the substrate,
- wherein the driver includes a position sensor capable of detecting that the substrate is present at a predetermined position, and outputting a signal indicating the detection, and
- an operation device that, upon receiving the signal, enables the position determiner to come in contact with the side surface of the substrate, wherein the operation device operates by a magnetic force or a pressure of a gas.
2 more elements
A storage medium that stores a program to allow a computer to execute a control method of a substrate holding device capable of suctioning and holding a front surface or a back surface of a substrate,
- the storage medium storing a program to allow the computer to:
- suction and hold the front surface or the back surface of the substrate by a suctioning member;
- and
- bring, into contact with a side surface of the substrate by a driver, a position determiner capable of pushing the substrate in contact with the side surface of the substrate, and positioning the suctioned substrate,
- wherein a first portion of the driver is capable of coming in contact with the substrate,
- when the suctioning member suctions the front surface or the back surface of the substrate, the first portion comes in contact with the substrate, to apply a force to the driver, and the driver is movable, and
- when the driver moves, a second portion of the driver enables the position determiner to come in contact with the side surface of the substrate and to push the substrate.
4 more elements
An electroplating apparatus comprising:
- a transporter that transfers a substrate,
- a substrate attaching/detaching device that attaches and detaches the substrate to and from a substrate holder to hold the substrate, and
- an electroplating treatment module that receives the substrate holder holding the substrate in the substrate attaching/detaching device, to subject the substrate to an electroplating treatment,
- wherein the transporter includes a substrate holding device, and transfers the substrate to the substrate attaching/detaching device or from the substrate attaching/detaching device, and
- the substrate holding device comprising:
- a position determiner capable of pushing the substrate in contact with a side surface of the substrate, and positioning the suctioned substrate, and
- a driver that enables the position determiner to come in contact with the side surface of the substrate, wherein the driver brings the position determiner into contact with the side surface of the substrate, and the position determiner thereby positions the substrate
- wherein the driver includes a position sensor capable of detecting that the substrate is present at a predetermined position, and outputting a signal indicating the detection, and
- an operation device that, upon receiving the signal, enables the position determiner to come in contact with the side surface of the substrate,
- wherein the operation device operates by a magnetic force or a pressure of a gas.
7 more elements
A storage medium that stores a program to allow a computer to execute a control method of a substrate holding device capable of suctioning and holding a front surface or a back surface of a substrate,
- the storage medium storing a program to allow the computer to:
- suction and hold the front surface or the back surface of the substrate by a suctioning member;
- and
- bring, into contact with a side surface of the substrate by a driver, a position determiner capable of pushing the substrate in contact with the side surface of the substrate, and positioning the suctioned substrate,
- wherein the driver includes a position sensor capable of detecting that the substrate is present at a predetermined position, and outputting a signal indicating the detection, and
- an operation device that, upon receiving the signal, enables the position determiner to come in contact with the side surface of the substrate,
- wherein the operation device operates by a magnetic force or a pressure of a gas.
4 more elements
Dependencies are inferred from the claim text.