Substrate processing apparatus and rotating electrical connector for vacuum

A rotating electrical connector for vacuum, comprising:

• a cylindrical rotator formed of an insulating material;
• a top bearing disposed on a top side surface of the rotator;
• a bottom bearing vertically aligned with the top bearing and disposed on a bottom side surface of the rotator;
• a top conductive ring and a bottom conductive ring disposed to cover a side surface of the rotator and spaced apart from each other;
• an insulating barrier disposed between the top conductive ring and the bottom conductive ring, disposed to cover the rotator, and having a washer shape;
• a stator disposed to be in contact with the top bearing and the bottom bearing and disposed to cover the insulating barrier and the top and bottom conductive rings;
• a top brush disposed to be in electrical contact with the top conductive ring and;
• a bottom brush rotating in an azimuthal direction with respect to the center axis of the stator to be disposed in order not to overlap the top brush.

A substrate processing apparatus, comprising:

• a first disk having a plurality of seating holes periodically arranged on a constant radius from a center axis and disposed inside a chamber to rotate,
• a plurality of electrostatic chucks which rotates while revolving with the rotation of the first disk, and
• a plurality of first rotary electrical connectors which are disposed in the seating holes to provide an electrical connection while providing a rotation motion to the plurality of electrostatic chuck, respectively,
• each of the first rotary electrical connectors comprises:
• a cylindrical rotator formed of an insulating material,
• a top conductive ring and a bottom conductive ring disposed to cover a side surface of the rotator and spaced apart from each other, and
• an insulating barrier disposed between the top conductive ring and the bottom conductive ring,
• wherein the insulating barrier blocks plasma generation of the top conductive ring and the bottom conductive ring.