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US 11,600,509 B2Granted
Micro pick up array and manufacturing method thereof
AssigneeAu Optronics Corporation
InventorsZe-Yu Yen, Yi-Fen Lan, Ho-Cheng Lee, Tsung-Tien Wu
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Abstract
A micro pick-up array used to pick up a micro device is provided. The micro pick-up array includes a substrate, a pick-up structure, and a soft polymer layer. The pick-up structure is located on the substrate. The pick-up structure includes a cured photo sensitive material. The soft polymer layer covers the pick-up structure. A manufacturing method of a micro pick-up array is also provided.
Claims12
A micro pick-up array used to pick up a micro device, the micro pick-up array comprises:
- a substrate;
- a pick-up structure located on the substrate, the pick-up structure being composed of a photo sensitive material, wherein the pick-up structure has a recess;
- and
- a soft polymer layer covering the pick-up structure, wherein the soft polymer layer fills into the recess, wherein a thickness of the soft polymer layer aligned with the recess is between 10 μm and 50 μm.
1 more element
A manufacturing method of a micro pick-up array, comprising:
- providing a substrate;
- forming a pick-up structure on the substrate, the pick-up structure being formed by a photolithography process, wherein the pick-up structure has a recess;
- and
- forming a soft polymer layer on the pick-up structure, wherein the soft polymer layer fills into the recess, wherein a thickness of the soft polymer layer aligned with the recess is between 10 μm and 50 μm.
1 more element
Dependencies are inferred from the claim text.